Nanoscale electrical contacts and interconnects1 Scope This technical report describes a variety of nanoscale contacts and nano interconnects used in research and development and in present day products. The intent of this technical report is to identify nanoscale contacts and nano interconnects that will be common in products, to describe the state of the art and to describe some key features and issues related to these contacts. In particular, the following are discussed in each of the nanoscale

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